Lamb wave resonators and resonator filters in periodical poled Z-cut LiTaO3 plate

Michio Kadota, Takashi Ogami, Kansho Yamamoto, Yasuo Cho, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An electric field distribution in a top electrode plane/periodical poled (PP) plate/bottom electrode plane looks like a cross-field model (by Smith) of an interdigital transducer (IDT) to generate a surface acoustic wave (SAW). Therefore, this structure has the possibility to generate an acoustic wave. This structure generates a SAW when the plate is thick, and a plate wave when the plate is thin. Although SAW resonators and resonator filters require grating reflectors at both sides of the IDT, previously reported devices composed of PP-plate on thick substrate don't include any grating reflectors, because they don't have electrode fingers. Therefore, their frequency responses are very weak. Proposing and applying effective edge reflections on the PP-plate instead of grating reflectors, authors fabricated Lamb wave resonators and resonator filters in PP Z-LiTaO3 plates. As a result, resonators with impedance ratio of 34 dB and resonator filters with a low loss of 2.4 dB and 3 dB bandwidth of 2.2% were obtained.

Original languageEnglish
Title of host publication2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages512-515
Number of pages4
ISBN (Electronic)9781509019472
DOIs
Publication statusPublished - 2016 Nov 28
Event11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 - Sendai, Japan
Duration: 2016 Apr 172016 Apr 20

Publication series

Name2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016

Other

Other11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
CountryJapan
CitySendai
Period16/4/1716/4/20

Keywords

  • 0-th Symmetric mode
  • Edge reflection
  • Lamb wave
  • Periodical Poled
  • Resonator
  • Resonator filter
  • Z-LiTaO

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

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