KrF excimer laser induced selective non-planer metallization

Shigeo Maeda, Kazuyuki Minami, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

Selective non-planer metallization method was developed. Ultraviolet photochemical deposition of chromium from gas phase precursors provided superior resolution, but deposited film was contaminated with carbon and oxygen and showed low electrical conductivity. Another type of metal line patterning process using KrF excimer laser induced chromium deposition was developed. Chromium film deposited was used as a mask material for patterning of the underlying nickel film. Nickel film was coated by electroless plating method which is suitable for three dimensional structure. This selective non-planer metallization process could be used in our project for smart catheters. As an example of smart catheters, tactile sensor was proposed and fabricated at the end of catheter. The structure of tactile sensor was shaped by excimer laser ablation process. The electrodes and the metal lines of tactile sensors were patterned using laser induced process.

Original languageEnglish
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Pages75-80
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994 Jan 1
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: 1994 Jan 251994 Jan 28

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period94/1/2594/1/28

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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