Abstract
Selective non-planer metallization method was developed. Ultraviolet photochemical deposition of chromium from gas phase precursors provided superior resolution, but deposited film was contaminated with carbon and oxygen and showed low electrical conductivity. Another type of metal line patterning process using KrF excimer laser induced chromium deposition was developed. Chromium film deposited was used as a mask material for patterning of the underlying nickel film. Nickel film was coated by electroless plating method which is suitable for three dimensional structure. This selective non-planer metallization process could be used in our project for smart catheters. As an example of smart catheters, tactile sensor was proposed and fabricated at the end of catheter. The structure of tactile sensor was shaped by excimer laser ablation process. The electrodes and the metal lines of tactile sensors were patterned using laser induced process.
| Original language | English |
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| Title of host publication | An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems |
| Publisher | Publ by IEEE |
| Pages | 75-80 |
| Number of pages | 6 |
| ISBN (Print) | 078031834X |
| Publication status | Published - 1994 Jan 1 |
| Event | Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Duration: 1994 Jan 25 → 1994 Jan 28 |
Other
| Other | Proceedings of the IEEE Micro Electro Mechanical Systems |
|---|---|
| City | Oiso, Jpn |
| Period | 94/1/25 → 94/1/28 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering