Kirkpatrick-Baez type x-ray focusing mirror fabricated by the bent-polishing method

Akihisa Takeuchi, Yoshio Suzuki, Hidekazu Takano, Yasuko Terada

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Abstract

Microfocusing optics with total reflection mirrors has been constructed, and a performance test in the hard x-ray region has been carried out. The material of the mirror is fused quartz, and parabolic surface figures are fabricated by the bent-polishing method. The reflective surface is coated with platinum. By configuring two parabolic mirrors in the Kirkpatrick-Baez optics, a focused beam size of 150 nm in the vertical direction ×110 nm in the horizontal direction has been achieved at an x-ray energy of 12 keV. A focused beam size of smaller than 300 nm is obtained within an x-ray energy range of 8-28 keV. In a performance test of the scanning microscope, fine periodic structures with a line pitch of 140 nm are clearly resolved. Diffraction limit and modulation transfer function of these focusing optics are discussed.

Original languageEnglish
Article number093708
JournalReview of Scientific Instruments
Volume76
Issue number9
DOIs
Publication statusPublished - 2005 Sep
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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