Abstract
The rate of change of uv photoemission spectroscopy (UPS) spectral features accompanying formation of the monohydride phase on Si(110)5 multiplied by 1 is measured as a function of H//2 pressure and W filament temperature in a thermal activation source. It is shown that an equilibrium thermodynamic calculation can reproduce the observed rates only if the adsorbing species produced at the hot filaments is atomic H and not vibrationally excited H//2. An approximate calculation of absolute rates makes sense only if the sticking probability of atomic hydrogen on clean, room-temperature Si (110) 5 multiplied by 1 is near unity.
| Original language | English |
|---|---|
| Title of host publication | J Vac Sci Technol |
| Pages | 397-399 |
| Number of pages | 3 |
| Volume | 14 |
| Edition | 1 |
| Publication status | Published - 1976 Jan |
| Event | Proc of Natl Symp of AVS, 23rd - Chicago, IL, USA Duration: 1976 Sep 21 → 1976 Sep 24 |
Other
| Other | Proc of Natl Symp of AVS, 23rd |
|---|---|
| City | Chicago, IL, USA |
| Period | 76/9/21 → 76/9/24 |
ASJC Scopus subject areas
- Engineering(all)