Kinetics of dissociative adsorption of dichlorosilane on Si(100)2 × 1

Hitoshi Sakamoto, Yuji Takakuwa, Toyokazu Hori, Tetsuhiro Horie, Maki Suemitsu, Nobuo Miyamoto

Research output: Contribution to journalArticle

6 Citations (Scopus)

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Chemical Compounds

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Physics & Astronomy