Key factors for the dynamic ETEM observation of single atoms

K. Yoshida, T. Tominaga, T. Hanatani, A. Tagami, Y. Sasaki, J. Yamasaki, K. Saitoh, N. Tanaka

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

We present further modifications to aberration-corrected environmental transmission electron microscopy (AC-ETEM) for the dynamic HRTEM observation of single atoms. Additional pumping levels that include three additional turbomolecular pumps (TMPs) enable a base pressure of 3.5 × 10 -5 Pa in the sample chamber. The effect of these additional TMPs on image resolution was measured in reciprocal space using information limit (Young's fringes) on a standard cross grating sample and also with platinum (Pt) single atoms on an amorphous carbon film (Pt/a-carbon). The Pt/a-carbon was used for measuring the effect of gas pressure on single-atom imaging in addition to the evaluation of vibrations of TMPs, samples, magnetic lenses and a microscope column of the AC-ETEM. TMPs did not affect the ETEM imaging performance when an anti-vibration table was used, and 0.10-nm resolution was achieved. Dynamic ETEM observation of Pt single atoms was achieved in 4.0 × 10-2 Pa of air, using a modified AC-ETEM system and a high-speed CCD camera with a time resolution of 0.05 s.

Original languageEnglish
Pages (from-to)571-582
Number of pages12
JournalJournal of Electron Microscopy
Volume62
Issue number6
DOIs
Publication statusPublished - 2013 Dec
Externally publishedYes

Keywords

  • HRTEM
  • differential pumping
  • environmental TEM
  • gas atmosphere
  • in situ
  • vibration.

ASJC Scopus subject areas

  • Instrumentation

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