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Isotopic labeling study of the oxygen diffusion in HfO2/SiO 2/Si
Ming Zhao, Kaoru Nakajima, Motofumi Suzuki, Kenji Kimura, Masashi Uematsu, Kazuyoshi Torii, Satoshi Kamiyama, Yasuo Nara, Heiji Watanabe, Kenji Shiraishi, Toyohiro Chikyow, Keisaku Yamada
Research output: Contribution to journal › Article › peer-review
13
Citations
(Scopus)