Irradiation damage in Fe-Co thin films with low-energy ion beam

Yuichi Ohsawa, Kiyoshi Yamakawa, Hiroaki Muraoka

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


The authors estimated the effect of ion-beam irradiation damage on saturation magnetic flux density (Bs) in Fe-Co thin films, a material expected to be used as a main pole in write heads in the era of Tbits/in 2 recording density. Fe-Co thin film deposition and successive ion-beam irradiation at 250 eV and a capping layer deposition were performed in the same ion-beam etching apparatus without breaking vacuum. The etching tests revealed Bs of the films with thickness of about 10 nm was decreased by the ion-beam irradiation; about 0.10.2 T decrease in Bs was observed with several nanometers etching. Regardless of etching depth, about 0.1 T decrease in Bs would appear even in the case of shallow etching of about 1 nm. Damage control in the main pole fabrication would be one of the important issues for the write heads.

Original languageEnglish
Article number5467395
Pages (from-to)2044-2047
Number of pages4
JournalIEEE Transactions on Magnetics
Issue number6
Publication statusPublished - 2010 Jun


  • Ion beam applications
  • Iron alloys
  • Magnetic heads
  • Magnetic materials
  • Magnetic recording

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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