Ionic fragmentation of SiH4 has been studied in the vicinity of the Si: K-edge in the photon energy range 1800-1900eV. Ionic fragments observed at photon energies above the Si: Ls → σ* excitation are mostly atomic ions Siq+ (q = 1-3) and H+. Ratios of the abundances for Si+, and Si2+ and Si3+ are roughly 4:4:1, and the abundance of H+ is much higher than the sum of the Si+, Si2+ and Si3+ abundances. The averaged kinetic energy release given to H+ is estimated to be about 12eV. This complete decomposition of SiH4 with the ejection of energetic H+ is interpreted as Coulomb explosion of the multiply-charged (mainly +4 or +5) parent ion produced via the vacancy cascade (successive Auger and/or Coster-Kronig transitions).
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Mathematical Physics
- Condensed Matter Physics