Ionic fragmentation of SiH4 following the K-shell excitation

Eiji Shigemasa, Kiyoshi Ueda, Yukinori Sato, Akira Yagishita, Hideki Maezawa, Taizo Sasaki, Masatoshi Ukai, Tatsuji Hayaishi

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23 Citations (Scopus)

Abstract

Ionic fragmentation of SiH4 has been studied in the vicinity of the Si: K-edge in the photon energy range 1800-1900eV. Ionic fragments observed at photon energies above the Si: Ls → σ* excitation are mostly atomic ions Siq+ (q = 1-3) and H+. Ratios of the abundances for Si+, and Si2+ and Si3+ are roughly 4:4:1, and the abundance of H+ is much higher than the sum of the Si+, Si2+ and Si3+ abundances. The averaged kinetic energy release given to H+ is estimated to be about 12eV. This complete decomposition of SiH4 with the ejection of energetic H+ is interpreted as Coulomb explosion of the multiply-charged (mainly +4 or +5) parent ion produced via the vacancy cascade (successive Auger and/or Coster-Kronig transitions).

Original languageEnglish
Pages (from-to)67-70
Number of pages4
JournalPhysica Scripta
Volume41
Issue number1
DOIs
Publication statusPublished - 1990 Jan 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Mathematical Physics
  • Condensed Matter Physics

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