Abstract
Ionic fragmentation of SiH4 has been studied in the vicinity of the Si: K-edge in the photon energy range 1800-1900eV. Ionic fragments observed at photon energies above the Si: Ls → σ* excitation are mostly atomic ions Siq+ (q = 1-3) and H+. Ratios of the abundances for Si+, and Si2+ and Si3+ are roughly 4:4:1, and the abundance of H+ is much higher than the sum of the Si+, Si2+ and Si3+ abundances. The averaged kinetic energy release given to H+ is estimated to be about 12eV. This complete decomposition of SiH4 with the ejection of energetic H+ is interpreted as Coulomb explosion of the multiply-charged (mainly +4 or +5) parent ion produced via the vacancy cascade (successive Auger and/or Coster-Kronig transitions).
Original language | English |
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Pages (from-to) | 67-70 |
Number of pages | 4 |
Journal | Physica Scripta |
Volume | 41 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1990 Jan 1 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Mathematical Physics
- Condensed Matter Physics
- Physics and Astronomy(all)