Ion polishing of zno films by an ecr system

Michio Kadota, Makoto Minakata, Toru Kasanami

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

SAW filters in the ZnO/IDT/glass type have periodic convexes of the same thickness as the IDT electrodes caused by the presence of IDT on the ZnO film surface and fine irregularities all over the ZnO film surface. These unevenness affects the SAW velocity dispertion. An attempt to smooth the unevenness, using the inclination effect in the ion polishing process, resulted in observation of an interesting surface smoothing phenomenon such as narrowing of the width of convex portions caused by IDT on ZnO film surface, smoothing of small convex spots of fine irregularities found all over the ZnO film surface, etc.

Original languageEnglish
Pages (from-to)224-226
Number of pages3
JournalJapanese journal of applied physics
Volume31
DOIs
Publication statusPublished - 1992 Jan

Keywords

  • Ecr
  • Inclination effect
  • Ion polishing
  • SAW filters
  • ZnO films

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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