ION-ETCHED BLAZED HOLOGRAPHIC ZONE PLATES.

Both high diffraction efficiency and mass producibility are required for practical use of holographic optical elements. Surface relief holograms achieve high through-put feature by using the hot pressing method, but lack diffraction efficiency. Blazed holographic gratings, formed by the ion etching method, satisfy both requirements. This paper describes a blazed hologram formation technique, an ion etching control method and experimental results for concentric holographic zone plates by ion beam etching.