Ion and neutral temperatures in a novel ultrahigh-frequency discharge plasma

Toshiki Nakano, Hiroto Ohtake, Seiji Samukawa

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Ion and neutral temperatures are measured in an ultrahigh-frequency discharge plasma through Ar and Ne by Doppler-shifted laser-induced fluorescence. The ion and neutral temperatures are estimated to be ≈ 0.066 eV (770 K) for Ar+ and 0.033 ± 0.004 eV (380 ± 50 K) for Ne, respectively. These temperatures are lower than those reported for electron cyclotron resonance and helicon wave plasmas. The low temperatures are attributed to the low electron temperature (≈ 2 eV) and excellent uniformity of the UHF plasma.

Original languageEnglish
Pages (from-to)L338-L340
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume35
Issue number3 A
Publication statusPublished - 1996 Mar 1
Externally publishedYes

Keywords

  • Ion temperature
  • Laser-induced fluorescence
  • Neutral temperature
  • Spokewise antenna
  • UHF plasma

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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