Abstract
Ion and neutral temperatures are measured in an ultrahigh-frequency discharge plasma through Ar and Ne by Doppler-shifted laser-induced fluorescence. The ion and neutral temperatures are estimated to be ≈ 0.066 eV (770 K) for Ar+ and 0.033 ± 0.004 eV (380 ± 50 K) for Ne, respectively. These temperatures are lower than those reported for electron cyclotron resonance and helicon wave plasmas. The low temperatures are attributed to the low electron temperature (≈ 2 eV) and excellent uniformity of the UHF plasma.
| Original language | English |
|---|---|
| Pages (from-to) | L338-L340 |
| Journal | Japanese Journal of Applied Physics, Part 2: Letters |
| Volume | 35 |
| Issue number | 3 A |
| Publication status | Published - 1996 Mar 1 |
| Externally published | Yes |
Keywords
- Ion temperature
- Laser-induced fluorescence
- Neutral temperature
- Spokewise antenna
- UHF plasma
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)