Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer

Yindi Cai, Xinghui Li, Ryo Aihara, Ren Zongwei, Yuki Shimizu, So Ito, Wei Gao

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

This paper presents a design study of an optical configuration for the fabrication of a two-dimensional grating, which will be used as a scale in a planar encoder system. For the modified two-axis Lloyd's mirror interferometer, in which major modifications have been made to the conventional one-axis Lloyd's mirror interferometer, computer simulation is carried out based on wave optics. Three-dimensional light intensity distributions of the fringe patterns are calculated to investigate the effect of the polarization modulation. In addition, a relationship between the asymmetry of the cross-sectional profiles of the grating pattern structures and the designed grating pattern period is also investigated. Furthermore, pattern exposure tests have been carried out by using a prototype optical setup for the modified two-axis Lloyd's mirror interferometer.

Original languageEnglish
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Volume10
Issue number5
DOIs
Publication statusPublished - 2016

Keywords

  • Grating
  • Interference lithography
  • Lloyd's mirror interferometer
  • Micro patterns
  • Wave optics

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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