Investigation of surface-acoustic-wave atomization using phase Doppler anemometry

Taiki Hirotomto, Motoaki Hara, Hiroki Kuwano, Taku Kudo, Hideaki Kobayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We developed surface acoustic wave (SAW) based atomizers. In our device, three functions, which were micro-pumps, a trench with a tank to feed and regulate the liquid, and faced arc-shaped interdigital transducers (AS-IDT) for atomization, were integrated on the surface of a piezoelectric chip (LiNbO3). Directional point source atomization was achieved by exploiting the integrated trench and AS-IDTs. Also, as a result of evaluations with laser phase Doppler anemometry (PDA), distribution of the droplet diameter was monodisperse, and mean diameter, volume and velocity droplets were 14.0 μm, 1.4 pl, and 0.29 m/s, respectively, when applying acetone to the liquid for atomization.

Original languageEnglish
Title of host publication2015 IEEE International Ultrasonics Symposium, IUS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479981823
DOIs
Publication statusPublished - 2015 Nov 13
EventIEEE International Ultrasonics Symposium, IUS 2015 - Taipei, Taiwan, Province of China
Duration: 2015 Oct 212015 Oct 24

Publication series

Name2015 IEEE International Ultrasonics Symposium, IUS 2015

Other

OtherIEEE International Ultrasonics Symposium, IUS 2015
CountryTaiwan, Province of China
CityTaipei
Period15/10/2115/10/24

Keywords

  • MEMS
  • PDA
  • SAW
  • atomization
  • fluidic device

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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