This paper reports the theoretical and experimental investigations on the strain sensing effect of a two dimensions (2D) photonic crystal (PhC) nanocavity resonator. By using the finite element method (FEM) and finite difference time domain (FDTD) simulations, the strain sensitivity of a high quality factor PhC nanocavity was calculated. Linear relationships between the applied strain and the shift in the resonant wavelength of the cavity were obtained. A single-defect silicon (Si) PhC cavity was fabricated, and measurements of the strain sensitivity were performed. Good agreement between the experimental and simulation results was observed.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics