Investigation of Si surface by reflection high-energy electron diffraction using the imaging plate

Hiroshi Miura, Kouichi Ohtaka, Daisuke Shindo, Tetsuo Oikawa

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Abstract

    Reflection high-energy electron diffraction (RHEED) of Si surface was observed by using the imaging plate. The streaky diffraction spots and weak Kikuchi patterns of Si(100) surface were clearly recorded owing to the wide dynamic range of the imaging plate. Furthermore, the change of the RHEED patterns due to the oxidation of Si surface was clarified in detail from their intensity profiles. It was shown that RHEED with the imaging plate was promising to the quantitative analysis of Si surface.

    Original languageEnglish
    Pages (from-to)1403-1405
    Number of pages3
    JournalMaterials Transactions, JIM
    Volume36
    Issue number11
    DOIs
    Publication statusPublished - 1995

    ASJC Scopus subject areas

    • Engineering(all)

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