Investigation of Si surface by reflection high-energy electron diffraction using the imaging plate

Hiroshi Miura, Kouichi Ohtaka, Daisuke Shindo, Tetsuo Oikawa

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Reflection high-energy electron diffraction (RHEED) of Si surface was observed by using the imaging plate. The streaky diffraction spots and weak Kikuchi patterns of Si(100) surface were clearly recorded owing to the wide dynamic range of the imaging plate. Furthermore, the change of the RHEED patterns due to the oxidation of Si surface was clarified in detail from their intensity profiles. It was shown that RHEED with the imaging plate was promising to the quantitative analysis of Si surface.

Original languageEnglish
Pages (from-to)1403-1405
Number of pages3
JournalMaterials Transactions, JIM
Volume36
Issue number11
DOIs
Publication statusPublished - 1995 Jan 1

ASJC Scopus subject areas

  • Engineering(all)

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