Investigation of evolution hydrocarbon species on a Si surface during methane plasma with and without substrate bias, using infrared spectroscopy in multiple internal reflection geometry

Masanori Shinohara, Hiromichi Shibata, Ken Cho, Tatsuyuki Nakatani, Keishi Okamoto, Yoshinobu Matsuda, Hiroshi Fujiyama

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8 Citations (Scopus)

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