Abstract
In this letter, we present experimental data showing Q change versus thickness for a quartz-crystal resonator fabricated with deep-reactive ion etching. Measurements show that Q increases as etch depth increases, and further that Q can be optimized as a function of etch depth and diameter of the resonator.
Original language | English |
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Article number | 1665070 |
Pages (from-to) | 1234-1236 |
Number of pages | 3 |
Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
Volume | 53 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2006 Jul 1 |
ASJC Scopus subject areas
- Instrumentation
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering