Interfacial dipole measurement of dielectric/silicon interface by X-ray photoelectron spectroscopy

K. Kakushima, K. Okamoto, K. Tachi, S. Sato, J. Song, T. Kawanago, P. Ahmet, N. Sugii, K. Tsutsui, T. Hattori, H. Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Interfacial dipole presented at the interface of dielectric/silicon has been measured with x-ray photoelectron spectroscopy. With a use of high energy x-ray source, the band bending profile of a silicon substrate and the surface potential can be determined. By comparing the potential profile for p+ and n+ wafer, a voltage shift can be calculated. Using this method, a large negative potential shift of 0.5V at La-silicate/silicon interface has been observed. The obtained value of intcrfacial dipole is consistent with the value obtained from gate leakage current analysis.

Original languageEnglish
Title of host publicationECS Transactions - Science and Technology of Dielectrics for Active and Passive Devices - 214th ECS Meeting
Pages11-15
Number of pages5
Edition21
DOIs
Publication statusPublished - 2009 Nov 23
EventScience and Technology of Dielectrics for Active and Passive Devices - 214th ECS Meeting - Honolulu, HI, United States
Duration: 2008 Oct 122008 Oct 17

Publication series

NameECS Transactions
Number21
Volume16
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherScience and Technology of Dielectrics for Active and Passive Devices - 214th ECS Meeting
CountryUnited States
CityHonolulu, HI
Period08/10/1208/10/17

ASJC Scopus subject areas

  • Engineering(all)

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    Kakushima, K., Okamoto, K., Tachi, K., Sato, S., Song, J., Kawanago, T., Ahmet, P., Sugii, N., Tsutsui, K., Hattori, T., & Iwai, H. (2009). Interfacial dipole measurement of dielectric/silicon interface by X-ray photoelectron spectroscopy. In ECS Transactions - Science and Technology of Dielectrics for Active and Passive Devices - 214th ECS Meeting (21 ed., pp. 11-15). (ECS Transactions; Vol. 16, No. 21). https://doi.org/10.1149/1.3100622