As an alternative contact electrode material to metals, which is necessary for downsized semiconductor devices in 10 nm processes, an intrinsically conducting polymer was studied in terms of its interfacial charge-transfer behavior with an inorganic semiconductor. Polypyrrole as the conducting polymer was formed using an electrochemical technique on an oxide semiconductor and its electronic properties were evaluated using scanning probe microscopy. The experimental results showed that an ohmic contact was observed dynamically at local positions, although a Schottky barrier was expected in the static electronic state over the measurement area. From this research, the conducting polymer was found to be promising as a contact electrode.
ASJC Scopus subject areas
- Physics and Astronomy(all)