The infrared absorption spectroscopy (IRAS) in the multiple internal reflection geometry was used to investigate the interaction of hydrogen-terminated Si(100), (110), and (111) surfaces with hydrogen plasma at room temperature. Thus, the IRAS data showed that dihydride and trihydride species on Si(100) were readily removed from the surface, and that a long-term H-plasma treatment of Si(100) dominantly produces monohydrides. It was found that due to H-plasma treatment hydrogen-terminated Si vacancies (VHx) were populated at subsurface regions.
|Number of pages||7|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 2003 Jan 1|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films