Interaction of hydrogen-terminated Si(100), (110), and (111) surfaces with hydrogen plasma investigated by in situ real-time infrared absorption spectroscopy

Masanori Shinohara, Takayuki Kuwano, Yosuke Akama, Yasuo Kimura, Michio Niwano, Hiroyasu Ishida, Rikizo Hatakeyama

Research output: Contribution to journalArticlepeer-review

53 Citations (Scopus)

Abstract

The infrared absorption spectroscopy (IRAS) in the multiple internal reflection geometry was used to investigate the interaction of hydrogen-terminated Si(100), (110), and (111) surfaces with hydrogen plasma at room temperature. Thus, the IRAS data showed that dihydride and trihydride species on Si(100) were readily removed from the surface, and that a long-term H-plasma treatment of Si(100) dominantly produces monohydrides. It was found that due to H-plasma treatment hydrogen-terminated Si vacancies (VHx) were populated at subsurface regions.

Original languageEnglish
Pages (from-to)25-31
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number1
DOIs
Publication statusPublished - 2003 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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