Integration of MEMS actuators with nanophotonics: Silicon submicron-wide waveguide switches for optical-path changes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Integrating ultra-small actuators based on MEMS technology with silicon submiciron waveguides, several kinds of optical switches are studied, which include physical contact of waveguides, variable air-gap coupler, Mach-Zehnder interferometer, etc.

Original languageEnglish
Title of host publication16th Opto-Electronics and Communications Conference, OECC 2011
Pages485-486
Number of pages2
Publication statusPublished - 2011 Oct 4
Event16th Opto-Electronics and Communications Conference, OECC 2011 - Kaohsiung, Taiwan, Province of China
Duration: 2011 Jul 42011 Jul 8

Other

Other16th Opto-Electronics and Communications Conference, OECC 2011
CountryTaiwan, Province of China
CityKaohsiung
Period11/7/411/7/8

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Communication

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