TY - GEN
T1 - Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection
AU - Ezura, Taiga
AU - Inomata, Naoki
AU - Ono, Takahito
N1 - Funding Information:
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Publisher Copyright:
© 2021 IEEE.
PY - 2021/6/20
Y1 - 2021/6/20
N2 - Magnetostrictive materials are useful for actuators, sensors. In this work, a Hall sensor is integrated in a magnetostrictive micromechanics. Deformation of the magnetostrictive material induces the change of magnetization, which is detected by the Hall sensor. In order to demonstrate this concept, a FeGa-Si biomaterial cantilever with a Si Hall sensor is microfabricated. FeGa thin film is deposited by a novel electroplating method. The Hall sensor signal can be obtained when the cantilever is vibrated at its resonant frequency. This Hall sensing element integration is effective way for the detection of strain and vibration of micromechanics.
AB - Magnetostrictive materials are useful for actuators, sensors. In this work, a Hall sensor is integrated in a magnetostrictive micromechanics. Deformation of the magnetostrictive material induces the change of magnetization, which is detected by the Hall sensor. In order to demonstrate this concept, a FeGa-Si biomaterial cantilever with a Si Hall sensor is microfabricated. FeGa thin film is deposited by a novel electroplating method. The Hall sensor signal can be obtained when the cantilever is vibrated at its resonant frequency. This Hall sensing element integration is effective way for the detection of strain and vibration of micromechanics.
KW - Displacement
KW - Electroplating
KW - Galfenol
KW - Magnetostriction
KW - Villari effect
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U2 - 10.1109/Transducers50396.2021.9495689
DO - 10.1109/Transducers50396.2021.9495689
M3 - Conference contribution
AN - SCOPUS:85114962554
T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
SP - 418
EP - 422
BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Y2 - 20 June 2021 through 25 June 2021
ER -