Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection

Taiga Ezura; Naoki Inomata; Takahito Ono

doi:10.1109/Transducers50396.2021.9495689

Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection

Taiga Ezura, Naoki Inomata, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Magnetostrictive materials are useful for actuators, sensors. In this work, a Hall sensor is integrated in a magnetostrictive micromechanics. Deformation of the magnetostrictive material induces the change of magnetization, which is detected by the Hall sensor. In order to demonstrate this concept, a FeGa-Si biomaterial cantilever with a Si Hall sensor is microfabricated. FeGa thin film is deposited by a novel electroplating method. The Hall sensor signal can be obtained when the cantilever is vibrated at its resonant frequency. This Hall sensing element integration is effective way for the detection of strain and vibration of micromechanics.

Original language	English
Title of host publication	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	418-422
Number of pages	5
ISBN (Electronic)	9781665412674
DOIs	https://doi.org/10.1109/Transducers50396.2021.9495689
Publication status	Published - 2021 Jun 20
Event	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States Duration: 2021 Jun 20 → 2021 Jun 25

Publication series

Name	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/Territory	United States
City	Virtual, Online
Period	21/6/20 → 21/6/25

Keywords

Displacement
Electroplating
Galfenol
Magnetostriction
Villari effect

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Control and Optimization
Instrumentation

Access to Document

10.1109/Transducers50396.2021.9495689

Cite this

Ezura, T., Inomata, N., & Ono, T. (2021). Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 (pp. 418-422). (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/Transducers50396.2021.9495689

Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection. / Ezura, Taiga; Inomata, Naoki ; Ono, Takahito.

21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 418-422 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ezura, T, Inomata, N & Ono, T 2021, Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection. in 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Institute of Electrical and Electronics Engineers Inc., pp. 418-422, 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Virtual, Online, United States, 21/6/20. https://doi.org/10.1109/Transducers50396.2021.9495689

Ezura T, Inomata N , Ono T. Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 418-422. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). doi: 10.1109/Transducers50396.2021.9495689

Ezura, Taiga ; Inomata, Naoki ; Ono, Takahito. / Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 418-422 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

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abstract = "Magnetostrictive materials are useful for actuators, sensors. In this work, a Hall sensor is integrated in a magnetostrictive micromechanics. Deformation of the magnetostrictive material induces the change of magnetization, which is detected by the Hall sensor. In order to demonstrate this concept, a FeGa-Si biomaterial cantilever with a Si Hall sensor is microfabricated. FeGa thin film is deposited by a novel electroplating method. The Hall sensor signal can be obtained when the cantilever is vibrated at its resonant frequency. This Hall sensing element integration is effective way for the detection of strain and vibration of micromechanics.",

keywords = "Displacement, Electroplating, Galfenol, Magnetostriction, Villari effect",

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N2 - Magnetostrictive materials are useful for actuators, sensors. In this work, a Hall sensor is integrated in a magnetostrictive micromechanics. Deformation of the magnetostrictive material induces the change of magnetization, which is detected by the Hall sensor. In order to demonstrate this concept, a FeGa-Si biomaterial cantilever with a Si Hall sensor is microfabricated. FeGa thin film is deposited by a novel electroplating method. The Hall sensor signal can be obtained when the cantilever is vibrated at its resonant frequency. This Hall sensing element integration is effective way for the detection of strain and vibration of micromechanics.

AB - Magnetostrictive materials are useful for actuators, sensors. In this work, a Hall sensor is integrated in a magnetostrictive micromechanics. Deformation of the magnetostrictive material induces the change of magnetization, which is detected by the Hall sensor. In order to demonstrate this concept, a FeGa-Si biomaterial cantilever with a Si Hall sensor is microfabricated. FeGa thin film is deposited by a novel electroplating method. The Hall sensor signal can be obtained when the cantilever is vibrated at its resonant frequency. This Hall sensing element integration is effective way for the detection of strain and vibration of micromechanics.

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Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection

Abstract

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