Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Magnetostrictive materials are useful for actuators, sensors. In this work, a Hall sensor is integrated in a magnetostrictive micromechanics. Deformation of the magnetostrictive material induces the change of magnetization, which is detected by the Hall sensor. In order to demonstrate this concept, a FeGa-Si biomaterial cantilever with a Si Hall sensor is microfabricated. FeGa thin film is deposited by a novel electroplating method. The Hall sensor signal can be obtained when the cantilever is vibrated at its resonant frequency. This Hall sensing element integration is effective way for the detection of strain and vibration of micromechanics.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages418-422
Number of pages5
ISBN (Electronic)9781665412674
DOIs
Publication statusPublished - 2021 Jun 20
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: 2021 Jun 202021 Jun 25

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period21/6/2021/6/25

Keywords

  • Displacement
  • Electroplating
  • Galfenol
  • Magnetostriction
  • Villari effect

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Instrumentation

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