Integration of a force sensor into a fast-tool-control unit for fabrication of large area microlens array

M. Tano, I Ko, A. Kimura, T. Sanuki, Y. J. Noh, S. Kiyono

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


This paper presents a fast-tool-control (FTC) unit for diamond turning of microlens arrays over large areas. The in-feed motion of the diamond micro-cutting tool is servo controlled by a piezoelectric actuator (PZT). The FTC-unit has an in-feed stroke of larger than 40 μm. A piezoelectric force sensor is integrated into the FTC-unit to detect the contact force and cutting force occurring at the interface between the tool tip and the workpiece surface. The PZT is oscillated with a certain frequency when making the micro-cutting tool contact with the workpiece surface. The output of the force sensor is confirmed to be stable within a sub-mN range when the oscillation frequency is from 200 Hz to 400 Hz. A 0.1 mN contacting force corresponding to an indentation depth of 50 nm is detected by the force sensor when a diamond micro-tool with a nose radius of 30 μm contacts with a aluminum roller surface. A diamond tuning-based experiment system of employing the FTC-unit is also constructed for fabrication of large area microlens arrays on roller workpieces.

Original languageEnglish
Pages (from-to)555-560
Number of pages6
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Issue number5
Publication statusPublished - 2006 Oct 1


  • Diamond turning
  • Fast tool control
  • Force sensor
  • Micro-lens array

ASJC Scopus subject areas

  • Mechanical Engineering


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