Integration and fabrication of PZT and metallic glass films for micro-mirror device

Yao Chuan Tsai, Jae Wung Lee, Takayuki Naono, Yu Ching Lin, Masayoshi Esashi, Takamichi Fujii, Thomas Gessner

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Publication statusPublished - 2013 Jan 1
EventSmart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 - Amsterdam, North Holland, Netherlands
Duration: 2013 Mar 132013 Mar 14

Conference

ConferenceSmart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013
CountryNetherlands
CityAmsterdam, North Holland
Period13/3/1313/3/14

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Computer Science Applications

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