Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining

P. Li, T. Sasaki, L. F. Pan, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining'. Together they form a unique fingerprint.

Earth and Planetary Sciences

Physics

Engineering

Computer Science

Material Science