Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining

P. Li, T. Sasaki, L. F. Pan, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We demonstrate here the fabrication of integrated tracking (horizontal) and focusing (vertical) micro lens actuators which are implemented on silicon-on-insulator (SOI) wafer using silicon bulk micromachining. The micro actuators that consist of flexures, a lens holder and comb structures with electrodes can realize two-dimensional movements of one objective lens for optical storage applications. DC and frequency responses of the integrated tracking and focusing actuators with or without lens are experimentally demonstrated by applying voltage to the micro lens actuators. The displacements of the proposed actuators have good linearity versus the square of the voltages in tracking and focusing directions. These experimental results show good agreement with theoretical predictions.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1546-1549
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/TerritoryChina
CityBeijing
Period11/6/511/6/9

Keywords

  • Lens actuator
  • focusing
  • micromachining
  • optical storage
  • silicon-on-insulator
  • tracking

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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