Integrated fluorescent analysis system with monolithic GaN light emitting diode on Si platform

H. Nakazato, H. Kawaguchi, A. Iwabuchi, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A GaN blue light emitting diode (LED) integrated monolithically on a Si substrate is used as a fluorescent light source of bio-fluidic micro total analysis system (μTAS) with polydimethylsiloxane (PDMS) channel. A Si photodiode (Si PD) is also installed on a Si substrate for fluorescent detection. Therefore, all basic optical components necessary for fluorescent μTAS are integrated on a Si platform. A GaN LED layer on a Si substrate is micromachined by etching the Si substrate to generate a ring-shaped light source for a dark-illumination optical configuration. The blue emission at the wavelength of 477nm suits the excitation of the fluorescent dye of fluorescein isothiocyanate (FITC). Using the integrated chip, the fluorescent emission form a flowing fluid with the dye is measured as a function of the concentration. The noise, sensitivity and detection limit are evaluated to be 0.57pA, 1.21pA/μM and 469nM, respectively.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages842-845
Number of pages4
DOIs
Publication statusPublished - 2012 May 7
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 2012 Jan 292012 Feb 2

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period12/1/2912/2/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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