Integrated experimental and numerical study of thermomechanical resist removal-cleaning performance using cryogenic micro-solid nitrogen spray

J. Ishimoto, D. Tan, U. Oh, T. Kubota, S. Samukawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

The fundamental characteristics of the resist removal-cleaning system using cryogenic micro-solid nitrogen spray flow are investigated by a new type of integrated measurement and numerical technique. It can be numerically predicted that the resist removal performance is improved by the scraping effect of impinging micro-solid nitrogen particle fragment in the narrow section between the resist. Furthermore, it is numerically and experimentally founded that the hybrid interactive effects of fluid mechanical force by impingement of micro solid particle and thermomechanical force due to ultra-high heat transfer characteristics contribute to the resist removal-cleaning process.

Original languageEnglish
Title of host publicationSemiconductor Cleaning Science and Technology 12, SCST 12
Pages83-90
Number of pages8
Edition5
DOIs
Publication statusPublished - 2011
Event12th International Symposium on Semiconductor Cleaning Science and Technology, SCST12 - 220th ECS Meeting - Boston, MA, United States
Duration: 2011 Oct 102011 Oct 11

Publication series

NameECS Transactions
Number5
Volume41
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

Other12th International Symposium on Semiconductor Cleaning Science and Technology, SCST12 - 220th ECS Meeting
CountryUnited States
CityBoston, MA
Period11/10/1011/10/11

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Integrated experimental and numerical study of thermomechanical resist removal-cleaning performance using cryogenic micro-solid nitrogen spray'. Together they form a unique fingerprint.

Cite this