Integrated circuit technology in MBE (author's transl)

T. Matsuo, M. Esashi

Research output: Contribution to journalReview articlepeer-review

Original languageEnglish
Pages (from-to)245-250
Number of pages6
Journaljapanese journal of medical electronics and biological engineering
Volume16
Issue number4
Publication statusPublished - 1978 Aug
Externally publishedYes

ASJC Scopus subject areas

  • Biomedical Engineering

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