INITIAL STAGE OF SPUTTERING AT SILICON OXIDE SURFACE.

Takeo Hattori, Yukimoto Hisajima, Hiroyuki Saito, Toshihisa Suzuki, Hiroshi Daimon, Yoshitada Murata

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Unknown Host Publication Title
Publisher	Berliner Elekronenspeicherring-Gesellschaft fuer Synchrotronstrahlung
Publication status	Published - 1982

ASJC Scopus subject areas

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title = "INITIAL STAGE OF SPUTTERING AT SILICON OXIDE SURFACE.",

author = "Takeo Hattori and Yukimoto Hisajima and Hiroyuki Saito and Toshihisa Suzuki and Hiroshi Daimon and Yoshitada Murata",

year = "1982",

language = "English",

booktitle = "Unknown Host Publication Title",

publisher = "Berliner Elekronenspeicherring-Gesellschaft fuer Synchrotronstrahlung",

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TY - GEN

T1 - INITIAL STAGE OF SPUTTERING AT SILICON OXIDE SURFACE.

AU - Hattori, Takeo

AU - Hisajima, Yukimoto

AU - Saito, Hiroyuki

AU - Suzuki, Toshihisa

AU - Daimon, Hiroshi

AU - Murata, Yoshitada

PY - 1982

Y1 - 1982

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M3 - Conference contribution

AN - SCOPUS:0020339621

BT - Unknown Host Publication Title

PB - Berliner Elekronenspeicherring-Gesellschaft fuer Synchrotronstrahlung

ER -