Initial oxidation of Si(100)- (2×1) as an autocatalytic reaction

Maki Suemitsu; Yoshiharu Enta; Yasushi Miyanishi; Nobuo Miyamoto

doi:10.1103/PhysRevLett.82.2334

Initial oxidation of Si(100)- (2×1) as an autocatalytic reaction

Maki Suemitsu, Yoshiharu Enta, Yasushi Miyanishi, Nobuo Miyamoto

Research output: Contribution to journal › Article › peer-review

65 Citations (Scopus)

Abstract

Time evolutions of O 2p intensity from real-time ultraviolet photoelectron spectroscopy were obtained for the initial oxidation of Si(100)- (2×1) surfaces at oxygen pressures P=7.5×10^-8–2.8×10_-6 Torr and temperatures T=RT-720°C. Despite the separation of the growth mode into the Langmuir-Hinshelwood mode in the low- T–high- P region and the 2D-island growth in the high- T–low- P region, they were unifiedly described by a single rate equation for the oxide coverage ?, which assumes two types of surface oxygen monomers and the number density of oxide islands that scales with θ(1-θ)².

Original language	English
Pages (from-to)	2334-2337
Number of pages	4
Journal	Physical review letters
Volume	82
Issue number	11
DOIs	https://doi.org/10.1103/PhysRevLett.82.2334
Publication status	Published - 1999
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1103/PhysRevLett.82.2334

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@article{8c027fedc11740ca918309088d7c239a,

title = "Initial oxidation of Si(100)- (2×1) as an autocatalytic reaction",

abstract = "Time evolutions of O 2p intensity from real-time ultraviolet photoelectron spectroscopy were obtained for the initial oxidation of Si(100)- (2×1) surfaces at oxygen pressures P=7.5×10-8–2.8×10-6 Torr and temperatures T=RT-720°C. Despite the separation of the growth mode into the Langmuir-Hinshelwood mode in the low- T–high- P region and the 2D-island growth in the high- T–low- P region, they were unifiedly described by a single rate equation for the oxide coverage ?, which assumes two types of surface oxygen monomers and the number density of oxide islands that scales with θ(1-θ)2.",

author = "Maki Suemitsu and Yoshiharu Enta and Yasushi Miyanishi and Nobuo Miyamoto",

year = "1999",

doi = "10.1103/PhysRevLett.82.2334",

language = "English",

volume = "82",

pages = "2334--2337",

journal = "Physical Review Letters",

issn = "0031-9007",

publisher = "American Physical Society",

number = "11",

}

TY - JOUR

T1 - Initial oxidation of Si(100)- (2×1) as an autocatalytic reaction

AU - Suemitsu, Maki

AU - Enta, Yoshiharu

AU - Miyanishi, Yasushi

AU - Miyamoto, Nobuo

PY - 1999

Y1 - 1999

N2 - Time evolutions of O 2p intensity from real-time ultraviolet photoelectron spectroscopy were obtained for the initial oxidation of Si(100)- (2×1) surfaces at oxygen pressures P=7.5×10-8–2.8×10-6 Torr and temperatures T=RT-720°C. Despite the separation of the growth mode into the Langmuir-Hinshelwood mode in the low- T–high- P region and the 2D-island growth in the high- T–low- P region, they were unifiedly described by a single rate equation for the oxide coverage ?, which assumes two types of surface oxygen monomers and the number density of oxide islands that scales with θ(1-θ)2.

AB - Time evolutions of O 2p intensity from real-time ultraviolet photoelectron spectroscopy were obtained for the initial oxidation of Si(100)- (2×1) surfaces at oxygen pressures P=7.5×10-8–2.8×10-6 Torr and temperatures T=RT-720°C. Despite the separation of the growth mode into the Langmuir-Hinshelwood mode in the low- T–high- P region and the 2D-island growth in the high- T–low- P region, they were unifiedly described by a single rate equation for the oxide coverage ?, which assumes two types of surface oxygen monomers and the number density of oxide islands that scales with θ(1-θ)2.

UR - http://www.scopus.com/inward/record.url?scp=0000147268&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0000147268&partnerID=8YFLogxK

U2 - 10.1103/PhysRevLett.82.2334

DO - 10.1103/PhysRevLett.82.2334

M3 - Article

AN - SCOPUS:0000147268

VL - 82

SP - 2334

EP - 2337

JO - Physical Review Letters

JF - Physical Review Letters

SN - 0031-9007

IS - 11

ER -

Initial oxidation of Si(100)- (2×1) as an autocatalytic reaction

Abstract

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