Initial growth characteristics of germanium on silicon in LPCVD using germane gas

S. Kobayashi, M. Sakuraba, T. Matsuura, Junichi Murota, N. Mikoshiba

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25 Citations (Scopus)


The growth characteristics in the initial stage of Ge epitaxy on the Si(1 0 0) epitaxial buffer layer have been investigated by ultraclean LPCVD at 350°C using GeH4 at 0.2 and 12 Pa with H2 or Ar as a carrier gas. When H2 was used as a carrier gas, an incubation period was found (about 12 min at 0.2 Pa), during which Ge nuclei were formed on Si. After the incubation period layer growth of Ge film began. In the case where Ar was used as a carrier gas, the incubation period was drastically reduced without any apparent change in the layer growth rate. The nucleus size was larger and the nucleus density was lower in the case of H2 as carrier gas. These growth characteristics are believed to be caused by the suppression of adsorption and/or decomposition of GeH4 on the H-terminated Si surface in the case of H2.

Original languageEnglish
Pages (from-to)686-690
Number of pages5
JournalJournal of Crystal Growth
Issue number1-4
Publication statusPublished - 1997 Apr


  • CVD
  • Epitaxy
  • GeH
  • H-termination
  • Incubation
  • Si/Ge

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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