Infrared study of chemistry of Si surfaces in etching solution

Michio Niwano, Taka Aki Miura, Ryo Tajima, Nobuo Miyamoto

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Infrared study of chemistry of Si surfaces in etching solution'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds