TY - JOUR
T1 - Infrared spectroscopy study of adsorption of silane on Si(0 0 1)
AU - Shinohara, Masanori
AU - Kimura, Yasuo
AU - Saito, Mineo
AU - Niwano, Michio
N1 - Funding Information:
Part of this work was supported by a Grand-in-Aid for Basic Scientific Research (Grand no. 11304018) from the Ministry of Education, Science, Sports and Culture of Japan.
PY - 2002/4/10
Y1 - 2002/4/10
N2 - We used infrared absorption spectroscopy in the multiple internal reflection geometry to investigate the adsorption of SiH4 on the Si(0 0 1)(2 × 1) surface. Comparing infrared data with the density functional cluster calculation, we show that at low hydrogen coverage the silane molecule dissociatively adsorbs on Si(0 0 1)(2 × 1) to populate a dihydride (SiH2) at the bridge site between two adjacent dimers and monohydride species; monohydrides are formed by terminating the unsaturated dangling bonds of dimers by hydrogen atoms released from the silane molecule. We suggest that at high hydrogen coverage, silane adsorbs onto a single dimer to generate monohydride and sylil groups (-SiH3). We also demonstrate that the dihydride species that is initially generated by silane adsorption, decomposes to monohydride species even at room temperature.
AB - We used infrared absorption spectroscopy in the multiple internal reflection geometry to investigate the adsorption of SiH4 on the Si(0 0 1)(2 × 1) surface. Comparing infrared data with the density functional cluster calculation, we show that at low hydrogen coverage the silane molecule dissociatively adsorbs on Si(0 0 1)(2 × 1) to populate a dihydride (SiH2) at the bridge site between two adjacent dimers and monohydride species; monohydrides are formed by terminating the unsaturated dangling bonds of dimers by hydrogen atoms released from the silane molecule. We suggest that at high hydrogen coverage, silane adsorbs onto a single dimer to generate monohydride and sylil groups (-SiH3). We also demonstrate that the dihydride species that is initially generated by silane adsorption, decomposes to monohydride species even at room temperature.
KW - Infrared absorption spectroscopy
KW - Semiconducting surfaces
KW - Silane
KW - Silicon
KW - Surface chemical reaction
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U2 - 10.1016/S0039-6028(01)01905-7
DO - 10.1016/S0039-6028(01)01905-7
M3 - Article
AN - SCOPUS:0037051880
VL - 502-503
SP - 96
EP - 101
JO - Surface Science
JF - Surface Science
SN - 0039-6028
ER -