Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer

Yuki Shimizu, Ryo Aihara, Zongwei Ren, Yuan Liu Chen, So Ito, Wei Gao

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

This paper presents a detailed analysis on the influence of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer, which can fabricate two-dimensional grating structures in a single exposure. In an ideal condition, defect-free two-dimensional grating structures can be fabricated by the interferometer. However, in a real case, visible stripes caused by misalignment errors of the optical components in the interferometer always appear on the fabricated grating structures. In this paper, theoretical analysis and experiments are carried out to analyze the influences of the misalignment errors of the optical components in the orthogonal two-axis Lloyd's mirror interferometer.

Original languageEnglish
Pages (from-to)27521-27535
Number of pages15
JournalOptics Express
Volume24
Issue number24
DOIs
Publication statusPublished - 2016 Nov 28

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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