Influence of the great east japan earthquake in fluctuation free facility for new information industry, Tohoku university

Yasuyuki Shirai, Fuminobu Imaizumi, Masaru Shiratori, Tadahiro Ohmi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)409-412
Number of pages4
JournalJournal of the Vacuum Society of Japan
Issue number9
Publication statusPublished - 2012

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Surfaces and Interfaces
  • Spectroscopy

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