Influence of substrate temperature on CeF3 thin films prepared by thermal evaporation

Arun Kumar Dorai, Selvasekarapandian Subramanian, Nithya Hellar, Jarkko Leiro

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


We have investigated the effect of substrate temperature on the structural, compositional and electrical properties of cerium fluoride thin films prepared by thermal evaporation method. The structure of cerium fluoride is hexagonal and the growth orientation changes with increase in substrate temperature. The substrate temperature favors the growth of vertical nanorods on the surface of the thin films. The compositional analysis confirms the formation of cerium oxyfluoride, leading to free fluoride ions. Electrical conductivity increases with increasing substrate temperature.

Original languageEnglish
Pages (from-to)765-772
Number of pages8
JournalMaterials Chemistry and Physics
Issue number2
Publication statusPublished - 2014 Jan 15


  • Electrical conductivity
  • Physical vapour deposition
  • Thin films
  • XPS

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics


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