Influence of laser power on the orientation and microstructure of CeO 2 films deposited on Hastelloy C276 tapes by laser chemical vapor deposition

Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

CeO 2 films were prepared on LaMnO 3 /MgO/Gd 2 Zr 2 O 7 multi-coated Hastelloy C276 tapes by laser chemical vapor deposition at different laser power (P L ) from 46 to 101 W. Epitaxial (1 0 0) CeO 2 films were prepared at P L = 46-93 W (deposition temperature, T dep = 705-792 K). Epitaxial CeO 2 films had rectangular-shaped grains at P L = 46-77 W (T dep = 705-754 K), while square-shaped grains were obtained at P L = 85-93 W (T dep = 769-792 K). CeO 2 films showed a columnar microstructure. Epitaxial (1 0 0) CeO 2 films with rectangular grains exhibited full width at half maximum of ω-scan on (2 0 0) reflection and φ{symbol}-scan on (2 2 0) reflection of 3.4-3.2° and 6.0-7.2°, respectively. The deposition rate of the epitaxial (1 0 0) CeO 2 films had a maximum of 4.6 μm h -1 at P L = 77 W (T dep = 754 K).

Original languageEnglish
Pages (from-to)6395-6398
Number of pages4
JournalApplied Surface Science
Volume256
Issue number21
DOIs
Publication statusPublished - 2010 Aug 15

Keywords

  • CeO
  • High deposition rate
  • Laser chemical vapor deposition

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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