Influence of laser power on atom probe tomographic analysis of boron distribution in silicon

Y. Tu, H. Takamizawa, B. Han, Y. Shimizu, K. Inoue, T. Toyama, F. Yano, A. Nishida, Y. Nagai

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

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Chemical Compounds

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Physics & Astronomy