The influence of impurity gas in the sputtering atmosphere on the microstructure and the GMR was investigated on Co/Cu multilayers. The MR ratio increased from 12 % to 27 %, when the chamber pressure, Pb before introducing Ar was changed from 5×10-8 Torr to 2×10-5 Torr by leaking air. From structural analysis, the multilayer fabricated with Pb = 2×10-5 Torr has a small grain diameter and a relatively flat stacking structure. Co layers in the multilayer fabricated under highly purified atmosphere and excessively contaminated atmosphere, behaved as particulate in lower temperature.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering