Influence of impurity gas in the sputtering atmosphere on the microstructure and the GMR in Co/Cu multilayers

S. Miura, D. Takahashi, M. Tsimoda, M. Takahashi, Satoshi Miura

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

The influence of impurity gas in the sputtering atmosphere on the microstructure and the GMR was investigated on Co/Cu multilayers. The MR ratio increased from 12 % to 27 %, when the chamber pressure, Pb before introducing Ar was changed from 5×10-8 Torr to 2×10-5 Torr by leaking air. From structural analysis, the multilayer fabricated with Pb = 2×10-5 Torr has a small grain diameter and a relatively flat stacking structure. Co layers in the multilayer fabricated under highly purified atmosphere and excessively contaminated atmosphere, behaved as particulate in lower temperature.

Original languageEnglish
Pages (from-to)936-938
Number of pages3
JournalIEEE Transactions on Magnetics
Volume34
Issue number4 PART 1
DOIs
Publication statusPublished - 1998
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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