Influence of deposition angle on the magnetic properties of Sm-Fe-N films fabricated by aerosol deposition method

Tomohito Maki, Satoshi Sugimoto, Toshio Kagotani, Koichiro Inomata, Jun Akedo, Takashi Ishikawa, Kenji Ohmori

Research output: Contribution to journalConference articlepeer-review

7 Citations (Scopus)

Abstract

In this paper, we studied the influence of deposition angle during the aerosol deposition (AD) method. The deposition angle was changed from 0° to 45°. The density of films did not change, but the surface roughness was improved by the inclination of deposition angle. This tendency was considered as one of advantages in manufacture of film magnets. However, the magnetization measured along the direction perpendicular to the film plane was decreased by the inclination. Referring to our previous work that the c-axis in Sm-Fe-N AD films has a tendency to align in the direction perpendicular to the film plane, it is satisfactory to consider that the increase in deposition angle weakened the alignment of c-axis.

Original languageEnglish
Pages (from-to)1409-1412
Number of pages4
JournalJournal of Alloys and Compounds
Volume408-412
DOIs
Publication statusPublished - 2006 Feb 9
EventProceedings of the Rare Earths'04 in Nara, Japan -
Duration: 2004 Nov 72004 Nov 12

Keywords

  • Aerosol deposition
  • Permanent magnets
  • Remanence
  • Sm-Fe-N
  • Surface roughness

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

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