Industry examples at the state-of-the-art: Hitachi

Katsuyoshi Washio

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationSilicon Heterostructure Handbook
Subtitle of host publicationMaterials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy
PublisherCRC Press
ISBN (Electronic)9781420026580
ISBN (Print)9780849335594
Publication statusPublished - 2005 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Environmental Science(all)
  • Materials Science(all)

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