Industrial application of atom probe tomography to semiconductor devices

Alexander Devin Giddings, Sebastian Koelling, Yasuo Shimizu, Robert Estivill, Koji Inoue, Wilfried Vandervorst, Wai Kong Yeoh

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy