In-situ simultaneous observation of phase transition and electrical properties of Pb(Zr,Ti)O3 thin film by high temperature XRD and electrical measurement apparatus

Toru Onoue, Naoki Wakiya, Koichi Seo, Takanori Kiguchi, Nobuyasu Mizutani, Kazuo Shinozaki

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Pb(Zr0.05Ti0.95)O3/(La,Sr)CoO3 thin films were prepared by pulsed laser deposition (PLD) on SrTiO 3(001) substrates. Phase transition behavior of Pb(Zr 0.05Ti0.95)O3(PZT) was investigated using high temperature X-ray diffraction (HT-XRD) and high-temperature electrical measurement. The phase transition temperature of PZT thin film is larger than bulk one. In 100 and 200nm-thickness epitaxial PZT thin films, the phase transition temperatures obtained from X-ray diffraction measurement and electrical property measurement are in good agreement.

Original languageEnglish
Pages (from-to)53-56
Number of pages4
JournalKey Engineering Materials
Volume320
DOIs
Publication statusPublished - 2006

Keywords

  • High Temperature
  • PLD
  • PZT
  • Phase Transition
  • Thin Film
  • X-ray Diffraction

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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