In situ self-calibration of profile height measurement of interferometric microscope

Satoshi Kiyono, Wei Gao, Masaya Kanai

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The self-calibration method which detects the derivative function of the calibration curve without using any references or any additional sensors has been applied to an interferometric microscope. Two specimens were used to get the discrete derivative function of the calibration curve. One is an inclined flat surface which gives a continuous input value of the calibration. The difference between two measurements which are obtained before and after a small shift in the height direction is used for getting a derivative function of the wanted calibration curve. The other is a step specimen whose step-height determines the small displacement of the calibration curve to get discrete derivative of the function. The results by these two methods have shown good agreement with each other to confirm the effectiveness and reliability of the proposed method. With the calibration and the correction, the variation of small step-height measurement is reduced to 0.5% which is 1/4 of the original one.

Original languageEnglish
Pages (from-to)241-245
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume64
Issue number2
DOIs
Publication statusPublished - 1998 Jan 1
Externally publishedYes

Keywords

  • Interferometric-microscope
  • Metrology
  • Mirau-objective
  • Non-linearity
  • Repeatability
  • Self-calibration
  • Step-height

ASJC Scopus subject areas

  • Mechanical Engineering

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