In-situ self calibration of nano-metrological sensors and its uncertainty

Satoshi Kiyono, Hiroki Shimizu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In some cases of profile measurements, the influence of the linearity error becomes more important than that of the sensitivity error. It becomes especially important to calibrate and compensate the linearity errors of sensors which are used in nanometrology. In the choice of a calibration method, the uncertainty of the compensation using the calibration result should be taken care of as well as the accuracy and resolution of the calibration itself.

Original languageEnglish
Title of host publicationProceedings of the Second International Symposium on Instrumentation Science and Technology
EditorsT. Jiubin, W. Xianfang, T. Jiubin, W. Xianfang
Pages2/013-2/020
Publication statusPublished - 2002
EventProceedings of the second International Symposium on Instrumentation Science and Technology - Jinan, China
Duration: 2002 Aug 182002 Aug 22

Publication series

NameProceedings of the Second International Symposium on Instrumentation Science and Technology
Volume2

Other

OtherProceedings of the second International Symposium on Instrumentation Science and Technology
CountryChina
CityJinan
Period02/8/1802/8/22

Keywords

  • Calibration
  • Linearity error
  • Metrology
  • Sensor

ASJC Scopus subject areas

  • Engineering(all)

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