In situ self-calibration of atomic force microscopy

Hyun Kyu Kweon, I Ko, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

This paper introduces an in situ self-calibration method to correct Z-directional distortion associated with atomic force microscopy (AFM), which occurs mainly due to the nonlinear motion of the servo piezo-electric elements (PZT) of the AFM. The principle of the method, results of simulation and experiment are presented. In this method, the derivative of the calibration curve function of the PZT actuator is calculated from two sets of profile measurement data, which are obtained from two measurements with a small Z-direction shift. Simulation results showed that the Z-directional distortion can be compensated with an accuracy approximately twice that of the Z-directional resolution of the calibrated AFM. The effectiveness of the proposed self-calibration method was confirmed through experimental calibration of a commercially available AFM.

Original languageEnglish
Pages (from-to)72-76
Number of pages5
JournalNanotechnology
Volume9
Issue number2
DOIs
Publication statusPublished - 1998 Jun 1

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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