Abstract
Melt growth behavior of polycrystalline silicon was observed using a newly developed in-situ monitoring system consisting of a furnace and a microscope. It is possible to perform a directional growth from seed crystal or crucible wall and to observe the growth interface by using this system. Differences of growth rate or interfacial morphology among each grain of polycrystalline silicon were observed during melt growth. The Mullins-Sekerka instability of growth interface was also observed in a silicon melt for the first time. This observation system is confirmed to become a useful tool for revealing the growth mechanism of polycrystalline silicon.
Original language | English |
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Pages (from-to) | 124-129 |
Number of pages | 6 |
Journal | Journal of Crystal Growth |
Volume | 262 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 2004 Feb 15 |
Keywords
- A1. In-situ observation
- A1. Interfaces
- B2. Polycrystalline silicon
ASJC Scopus subject areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry