In-situ observations of melt growth behavior of polycrystalline silicon

Kozo Fujiwara, Yoshikazu Obinata, Toru Ujihara, Noritaka Usami, Gen Sazaki, Kazuo Nakajima

Research output: Contribution to journalArticlepeer-review

54 Citations (Scopus)

Abstract

Melt growth behavior of polycrystalline silicon was observed using a newly developed in-situ monitoring system consisting of a furnace and a microscope. It is possible to perform a directional growth from seed crystal or crucible wall and to observe the growth interface by using this system. Differences of growth rate or interfacial morphology among each grain of polycrystalline silicon were observed during melt growth. The Mullins-Sekerka instability of growth interface was also observed in a silicon melt for the first time. This observation system is confirmed to become a useful tool for revealing the growth mechanism of polycrystalline silicon.

Original languageEnglish
Pages (from-to)124-129
Number of pages6
JournalJournal of Crystal Growth
Volume262
Issue number1-4
DOIs
Publication statusPublished - 2004 Feb 15

Keywords

  • A1. In-situ observation
  • A1. Interfaces
  • B2. Polycrystalline silicon

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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