@article{0b5a9a74f21e4afd972f266028f4b153,
title = "In-situ Observation of Undevelopment Patterns in Atomic Force Microscope Liothography",
author = "Takao Shiokawa and Yoshinobu Aoyagi and Takashi Hanada and Takuo Sugano and Masatsugu Shigeno",
note = "Copyright: Copyright 2017 Elsevier B.V., All rights reserved.",
year = "1995",
doi = "10.2494/photopolymer.8.677",
language = "English",
volume = "8",
pages = "677--678",
journal = "Journal of Photopolymer Science and Technology",
issn = "0914-9244",
publisher = "Tokai University",
number = "4",
}